Energy-efficient physical vapor deposition of transition metal nitride thin films
- Författare
- Linköpings universitet Sanath Kumar Honnali
- (Sanath Kumar Honnali., Funding: The work is supported financially by the VINNOVA Competence Centre FunMat-II (Grant No. 2022-03071), the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University (Faculty Grant SFO-Mat-LiU No. 2009 00971), the Knut and Alice Wallenberg foundation through the Wallenberg Academy Fellows program (KAW-2020.0196), the Swedish Research Council (VR) under Project No. 2021-03826, and the Swedish Energy Agency under Project No. 52740-1., Härtill 2 uppsatser, Lic.-avh. (sammanfattning) Linköping : Linköpings universitet, 2024)
- Genre
- Avhandlingar, theses
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Department of Physica, Chemistry and Biology, Linköping University | 2024 | Sverige, Linköping | x, 65 sidor illustrationer | 978-91-8075-702-7 |